Sputtering Targets Overview: Everything You Need to Know

Sputtering Targets Overview: Everything You Need to Know

Sputtering targets are materials used to produce thin films in a technique known as sputter deposition, or thin film deposition. In this process, the sputtering targets start off as a solid and are then split up by gaseous ions into small particles that form a spray and coat a material, which is called the substrate.

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If you work with materials or electronics, you might have heard of "sputtering targets." They are essentially materials used to apply thin films on electronic devices. Understanding them is crucial, as there are different types and methods involved. This guide covers everything you need to know, whether you're a beginner or well-versed in thin film deposition.

What are sputtering targets made of?

Sputtering targets come in various materials depending on their intended use, including metals, ceramics, alloys, or composites.

Metal targets are frequently used due to their excellent conductivity for heat and electricity and their ability to form various alloys. Common metals include gold, silver, copper, aluminum, and titanium.

Ceramic targets are notable for their strength, chemical resistance, and wear resistance. Examples include aluminum oxide, silicon dioxide, and titanium dioxide.

Alloy targets combine two or more metals for specific physical or chemical properties. For example, an alloy of gold and silver can produce a conductive thin film, though not as conductive as pure gold or silver.

Composite targets mix different materials, such as metal and ceramic, to provide a unique combination of properties. An example would be a copper and aluminum oxide composite, resulting in a highly conductive thin film that adheres well to surfaces.

What is sputtering and how does it work?

Sputtering is a method to transfer material from a sputtering target to a substrate surface, often in a vacuum chamber filled with low-pressure gas, typically argon.

The gas is ionized into plasma via electrical discharge, producing positively charged ions and free electrons. These ions then target the sputtering material, dislodging its atoms. These atoms travel through the vacuum and adhere to the substrate surface, forming a thin film.

Several sputtering techniques are available such as DC sputtering, RF sputtering, reactive sputtering, and magnetron sputtering. Each method has its advantages and drawbacks depending on the application and desired thin film characteristics.

Types of Sputtering Targets

Sputtering targets can be made from different materials to produce thin films. Here are the main types:

• Metal targets: Commonly used for their excellent heat and electrical conductivity. Examples include gold, silver, copper, aluminum, and titanium.
• Ceramic targets: Known for their hardness, wear resistance, and chemical stability. Examples include silicon dioxide, aluminum oxide, and titanium dioxide.
• Alloy targets: Created by combining two or more metals for specific properties, such as Nickel Chromium Targets made from nickel and chromium alloys.
• Composite targets: Made by combining different types of materials to achieve specific properties, such as a copper and aluminum oxide composite.

Applications of sputtering targets

Sputtering targets are essential in various industries for producing thin films. These films are used in semiconductor manufacturing, hard drives, and solar panels.

In semiconductor manufacturing, sputtering targets apply tiny metal pieces and other materials onto silicon wafers, forming complex structures necessary for electronic devices.

For hard drives, thin films of magnetic materials are applied to disks to store vast amounts of digital data.

In optics, thin films of metals and other special materials are applied to lenses and mirrors, enhancing their performance.

Solar panels benefit from thin films of metals and other materials deposited onto silicon wafers, enabling the conversion of sunlight into electricity.

Factors to consider when choosing sputtering targets:

• Material: Select a material with the specific properties needed for the desired thin film and compatible with the deposition method.
• Purity: Ensure the material is as pure as possible, as impurities can adversely affect thin film properties.
• Size and shape: Choose based on the substrate and the deposition system.
• Deposition method: Opt for a method that delivers the desired thin film properties and is suitable for the material and substrate.

Quality Control and Testing Methods for Sputtering Targets

Ensuring high-quality sputtering targets is crucial in manufacturing. Various methods ensure that targets are pure, correctly sized, shaped, and undamaged.

Testing the Material

To guarantee material purity, several instruments like X-ray machines, inductively coupled plasma (ICP) analysis, and glow discharge mass spectrometry (GDMS) are used.

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Checking the Dimensions

We verify target size and shape using machines like optical profilometry, coordinate measuring machines (CMM), and laser scanning.

Verifying the Surface Finish

The surface finish and roughness are checked using scanning electron microscopy (SEM), atomic force microscopy (AFM), and optical microscopy.

Checking for Damage and Dirt

Visual inspection, leak testing, and vacuum packaging are employed to ensure there are no damages or contaminants on the target.

Maintaining and Handling Sputtering Targets

Proper maintenance and handling of sputtering targets are essential for their longevity and performance. Here are some tips:

1. Store targets in a clean, dry place to prevent contamination.
2. Handle targets with care, using clean gloves and tools to avoid introducing contaminants.
3. Regularly inspect targets for wear and damage, such as cracks or pits, which can affect performance.
4. Clean targets regularly to remove built-up dirt or other deposits.

Conclusion

Sputtering targets are critical for producing high-quality electronics, optics, and other advanced materials. This guide has provided insight into the various types of sputtering targets, their manufacturing processes, and quality control measures. Understanding these elements is crucial for creating high-quality thin films. As a manufacturer, we can provide valuable advice if you need solutions for your project.

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What Are Sputtering Targets, and Why Should You Recycle ...

Sputtering targets are materials used to produce thin films in a technique known as sputter deposition, or thin film deposition. In this process, the sputtering targets start off as a solid and are then split up by gaseous ions into small particles that form a spray and coat a material, which is called the substrate.

Sputtering targets are often overlooked as a source of precious metal scrap. Let’s take a look at why you should seek to recycle any sputtering target scrap you own.

Why Sputtering Targets Are An Excellent Source Of Precious Metal Scrap

Sputter deposition is often involved in the production of semiconductors and computer chips. As such, most sputtering target materials are metallic alloys or elements, although some ceramic targets are available that create hardened thin coatings for some tools.

Once a sputtering target has been used, most will assume it is now useless. However, there is usually some valuable metal material left that should be recycled. In many cases, the metal could even turn out to be an incredibly rare precious metal like rhodium that can often be recycled as well.

Here’s a list of all the sputtering targets that are worth recycling:

1. Aluminum Targets: Aluminum sputtering is often used for semiconductor applications. Though it is not the most valuable metal, it is still in demand due to its versatility. You can find recycled aluminum in almost any modern vehicle or airplane, and it is used in many household items. Aluminum is also great for heat resistance, which makes it the perfect metal for containers.
2. Copper Targets: Copper is often used for electrodes and other applications where electrical conductivity is crucial. It is used in many applications like plumbing, wiring, and windshield films.
3. Tin Targets: Tin can be applied to many materials to improve their properties. It is used in sputtering to improve corrosion resistance.
4. Zinc Targets: Zinc targets are also used for their corrosion resistance. When sputtered onto another metal, it serves as a corrosion barrier, which is why it’s typically used to produce cathodes. Zinc can also be found in batteries, propellants, and paints.
5. Platinum, Silver, and Gold: Precious metals like gold, silver, and platinum are sometimes used in sputtering applications. They provide a combination of chemical inertness and electrical conductivity, making them excellent for instrument and electrode production. They are also worth recycling for their financial value alone.

Recycle Your Sputtering Targets At A Precious Metals Refiner

If you have any sputtering targets you’d like to recycle, be sure to sell them to a precious metals refiner like Manhattan Gold & Silver. We can quickly separate the metals in your sputtering target to extract precious metals like gold and deliver a quick, fair payout.

Want more information on metal sputtering target? Feel free to contact us.